IAGS :: Volume #1

#75: Etching machine development

LNMTL needs user funding to survive Read More

The mask aligner also names: The mask alignment photo exposure machine, the commonly used mask aligner is the mask aims at the photoetching, makes the core equipment of large-scale integrated circuit, at the beginning of each chip is born, must undergo lithography forging, briefly, mask aligner engineer's design ‚engraving’ in backing material- on silicon chip, integrates several billions transistors in 2-3 square centimeters mind/square inch place. 光刻机又名:掩模对准曝光机,常用的光刻机是掩膜对准光刻,是制造大规模集成电路的核心装备,每颗芯片诞生之初,都要经过光刻技术锻造,简单地说,光刻机就是把工程师的设计‘刻印’在基底材料-硅片上,在2-3平方厘米的方寸之地集成数十亿晶体管。 Mask aligner ‚engraving’ processed silicon chip after the etching machining, through the chemical reaction, the physical effect of impact detachment abandons ‚silicon chip’ again on abandoned part, experiences certain package processes again, the mysterious silicon chip material recycles waste, turns into the value soaringly e-pneumatic chip. 光刻机‘刻印’处理过的硅片再经过蚀刻机加工,通过化学反应,物理撞击作用移除废弃‘硅片’上的废弃部分,再经历某些封装工艺,神奇硅片材料变废为宝,变成价值高昂的-电子芯片。 Relational 5 nano-meters etching extremely mass production period that because the week is popular, the mask aligner becomes most important in people heart, if the mask aligner has broken through again, then the chip domain will be the same with the High Speed Rail domain, breaks through the Western country trap to complete the curve to pass another vehicle. 因为周兴的关系五纳米级蚀刻极量产可期,光刻机成为众人心中的重中之重,如果光刻机再有所突破,那么芯片领域会和高铁领域一样,突破西方国家封堵完成弯道超车。 „What? Some words saying quickly, do not keep guessing.” Professor strict is staring Zhou Xing, urged that asked: “不过什么？有话快说,别卖关子。”严教授瞪着周兴,催促地问: „Mask aligner I have studied, but, does not have other idea temporarily.” Zhou Xing looked at Professor strict, said lightly: “光刻机我是有研究过,不过,暂时没别的想法。”周兴看了严教授一眼,淡淡地说: hears word, a people facial color loosen on the scene, showed the expected look, on the face also has one to regret, the look was complex. 闻言,在场众人面色一松,露出意料之中的神色,脸上又带了一丝遗憾,神色复杂。 The mass production craft of 5 nano-meters etching machine was attacked and captured by Zhou Xing, if the mask aligner were also even broken through by Zhou Xing, his R & D capability also was too rather scary. 五纳米级蚀刻机的量产工艺被周兴攻克,如果连光刻机也被周兴突破了,那他的研发能力未免也太吓人了。 The mask aligner may be more complex than the etching machine, the core of chip is the mask aligner, the core of mask aligner is lens, at present the mask aligner deep ultraviolet invasion mask aligner of the world 's mainstream, the limit of this technology is above 14 nano-meters, below 10 nanometers mask aligner must use the EUVL ( euv ) technology, even if this technology the overseas giants were still in the laboratory to the stage that the commercialization develops, the gap vast gap is not easily can span. 光刻机可比蚀刻机复杂多了,芯片的核心是光刻机,光刻机的核心是镜头,目前世界主流的光刻机还是深紫外侵入式光刻机,这个技术的极限是14纳米级以上,十纳米以下的光刻机则要用到极紫外光刻(euv)技术,这项技术即使国外巨头都尚处于实验室向商业化发展的阶段,鸿沟般的巨大差距不是轻易就能跨越的。 When the people are disappointed, takes it for granted. 众人失望之余,又觉得理所当然。 „Temporarily doesn't have other idea? Your meaning is you have the idea?” Unlike others, Professor strict pays attention to Zhou Xing the reply especially, presses on step by step asked: “暂时没别的想法？你的意思是你还是有想法的咯？”与其他人不一样,严教授格外留意周兴的回答,步步紧逼地问: „strict, we first took the etching machine mass production craft says again! The research and development, must come step by step, do not aim too high!” Welcomes the vision that Professor strict is inquiring into, the week is popular smiles mystically, evades the important questions for the easy said: “严老,我们还是先把蚀刻机量产工艺拿下再说吧！研发嘛,总要一步一步来,不要好高骛远嘛！”迎着严教授探究的目光,周兴神秘地笑了笑,避重就轻地说: Has Zhou Xiaozhi this research and development auxiliary sharp weapon, there is a virtual reality experiment this high-quality research environment, the system task has not settled accounts, if necessary, the research and development limit nano-meter mask aligner difficulty is also big, but, must control the rhythm, otherwise was stressed the slice research by ‚relevant agency’ on the gain does not equal the loss. 有周小智这个研发辅助利器,又有虚拟实验这个优质的研究环境,系统任务还尚未结算,如果有需要,研发极限纳米级的光刻机难度也算大,不过,还是得控制一下节奏,不然被‘相关机构’抓去切片研究就得不偿失了。 „Your boy cunning as ghost, is definitely thinking other wicked scheme at heart now!” Professor strict stares Zhou Xing not to believe that said: “你小子奸猾似鬼,心里现在肯定在想别的鬼主意！”严教授瞪着周兴不相信地说: „Good! old strict slightly should not be popular again awkwardly, will happen the time to the matter that should have naturally.” Professor side does not know whether to laugh or cry looks at Professor strict, interposed: “好啦！老严别再为难小兴了,时机到了该发生的事情自然而然就会发生。”方教授哭笑不得地看着严教授,插话道: „Yes, now on matter is quite on hand important, we hurry to try to make this new-style etching machine.” Professor slow was in high spirits saying: “是啊,现在手头上的事情比较重要,我们赶紧把这台新式蚀刻机试造出来。”徐教授精神振奋地说: „Right, old strict, hasn't this matter reported with Director Zheng? You catch up to follow close on communicate.” Professor Liu thought of anything suddenly, reminded Professor strict saying: “对了,老严,这件事还没跟郑主任汇报吧？你赶紧跟沟通一下。”刘教授突然想到了什么,提醒严教授道: „Un, I inform him immediately.” Professor strict gawked, takes up the cell phone to arrive nearby to dial hastily: “嗯,我马上通知他。”严教授愣了一下,连忙拿起手机走到一旁拨打起来: Old stick-in-the-mud Professor strict was opened by Professor Liu, the scene style suddenly changes. 老顽固严教授被刘教授支开了,现场画风突然一变。 „Slightly is popular, the system hit module I had not listened a moment ago clearly, you told again me.” Professor reckless inquired to Zhou Xing: “小兴,系统撞击模块我刚才没听清楚,你再跟我讲一下。”胡教授向周兴询问道: „Slightly is popular, the chip of controller must use that model, then I prepare.” Professor Liu looks that Zhou Xing asked: “小兴,控制器的芯片是要用那个型号,回头我准备一下。”刘教授看着周兴问: „Lofty aspiration, brings the blueprint and drawing instrument.” Professor side looked that told to Guo Dazhi, looks at the people saying: „Everyone laborious, must put in order to come out the blueprint of total regulation tonight.” “大志,把图纸和绘图工具拿过来。”方教授看向郭大志吩咐了一句,看着众人道:“大家辛苦一下,今晚务必把总程的图纸整出来。” Guo Dazhi selected, turned around to take the drawing instrument to go, the people followed to be busy at work, reorganized the material, asked Zhou Xing to verify the data, combed the technical process,...... 郭大志点了下头,转身拿绘图工具去了,众人纷纷跟着忙活起来,整理资料的,找周兴核实数据的,梳理工艺流程的,……。 In an instant, in the laboratory the people disperse, enters the research of trial manufacturing etching machine to make the stage. 转眼之间,实验室内众人分散开来,进入试制蚀刻机的研造阶段。 After Director Zheng ended the telephone conversation, Professor strict looks at the people bustling busy scenes, immediately after ‚interrogating and torturing’ week is popular ‚foundation’ the brain of matter forgetting, rolls up the sleeves to follow to join the research to make the team of etching machine together. 跟郑主任结束通话之后,严教授看着众人热火朝天忙碌的场景,当即把‘拷问’周兴‘根底’的事忘之脑后,挽起袖子跟着一起加入研造蚀刻机的队伍。 The busy time passes substantial and fast, in an instant one week passes by. 忙碌的时间过得又充实又快速,转眼一星期过去。 Since was taken possession by the system, Zhou Xing life trend dwelling male, the daily time does not treat in the laboratory produces the etching machine with the professors, hides in room Reamon does the research, the theme of life only has the study. 自从被系统附身,周兴的生活趋向宅男化,每天的时间不是待在实验室与教授们造蚀刻机,就是躲在房间里蒙头做研究,生活的主旋律只剩下学习。 Under this wholly absorbed condition, the week is popular the road of scientific research, more walks is more unobstructed. 这种专心致志的状态下,周兴科研之路,越走越通畅。 Merely one week of time, in the people unconscious situation, Zhou Xing changed from guest to host the inspirational figure of entire team, is leading the development project of etching machine. 仅仅一周时间,在众人不知不觉的情况下,周兴反客为主成了整个项目组的灵魂人物,主导着蚀刻机的研制工程。 Afternoon of eighth day, the spacious electronic lab assistants gather. 第八天的下午,宽敞的电子实验室人员聚集。 Director Zheng leads with a numerous faculty, the experts and professors fall on Zhou Xing behind, looks at Zhou Xingzhan in front of a liquid crystal screen of exposed electronic instrumentation equipment, „” types on the keyboard, pours into the code. 郑主任与一众系院领导,专家教授落在周兴身后,看着周兴站在一台裸露的电子仪器设备的液晶屏幕前,“噼里啪啦”敲打键盘,灌入代码。 „Drop drop....” The electron resounds, the circular telegram indicating lamp of exposed electronic device suddenly one bright. 一阵“滴滴…。”的电子鸣响,裸露的电子设备的通电指示灯骤然一亮。 „Slightly is popular, the controller has the response, the system inserts successfully, self-checking passes.” Guo Dazhi closely is staring at the liquid crystal screen waterfall class/flow English code, reports to say to Zhou Xing excitedly: “小兴,控制器起反应,系统嵌入成功,自检通过。”郭大志紧紧盯着液晶屏幕瀑布流般的英文代码,兴奋地向周兴汇报道: hears word, on Zhou Xing the face exposes a smile, all step mistakes, the system has not inserted successfully is inevitable. 闻言,周兴脸上展露一丝微笑,所有步骤没有出差错,系统嵌入成功是必然的。 A crowd tumult, Director Zheng urged unbearably anxiously, said: „Slightly is popular, since the system inserted successfully, that started to experiment quickly!” 人群一阵骚动,郑主任急不可耐地催促,道:“小兴,既然系统嵌入成功了,那快开始试验吧！” „Un, school leader Guo you puts the material! I activate the processing program, conducts the machining experiment.” Zhou Xing then looked at Director Zheng, nods: “嗯,郭学长你放料吧！我启动加工程序,进行加工试验。”周兴回头看了郑主任一眼,点了点头: „ Good! Guo Dazhi nods, delivers to enter the material mouth the material impatiently. “好！郭大志点了点头,迫不及待地将材料送进入料口。 The material was entered the material mouth the conveyer belt to embezzle by the etching machine all of a sudden, the electronic device resounds „incites” the revolution sound. 材料一下子被蚀刻机入料口的传送带吞没,紧接着电子设备响起一阵“滋滋滋”的运转声。 „Everyone please look at the liquid crystal screen, this is the message data of three-dimensional solid image feedback etching machining material.” Zhou Xing has turned the head, to a people introduced: “各位请看液晶屏幕,这是三维立体图像反馈蚀刻机加工材料的信息数据。”周兴转过头去,向众人介绍道: The people hold the breath to look, see only the liquid crystal window a green solid figure, the left and right were demonstrating a silicon chip material surface non-stop flaking the material the data message. 众人屏息而看,只见液晶屏幕显示着一个绿色的立体图形,左右两侧显示着一颗硅片材料表面不停剥落材料的数据信息。 „Has been able to process in 7 minutes of material completes, later automatic detection material processing result, if not appear qualified, the system will judge, conducts the second processing or destruction processing.” Zhou Xing continues to a people introduced: “在过七分钟材料就能处理完成,之后自动检测材料加工结果,如果出现不合格,系统将进行判断,进行二次加工或是销毁处理。”周兴继续向众人介绍道: „Success?” Director Zheng stares at the liquid crystal screen to ask impatiently: “成功了吗？”郑主任盯着液晶屏幕迫不及待地问:
To display comments and comment, click at the button